Fakultät für Elektrotechnik und Informationstechnik
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Micro- and Nanoelectronics

The cleanroom at the Center for Micro and Nanostructures

Micro- and nanoelectronics rank among the key technologies in information and communication technologies (ICT), and is currently one of the most important fields of innovation. This research field deals with establishing new process technologies as well as the new and continued development of modern devices that constitute the basis for micro- and nanoelectronics, sensor technology, and bioelectronics.

Our research work is supported by four columns:
On the technological side, there is the Center for Micro and Nanostructures (ZMNS), which provides state-of-the-art semiconductor technology. It is necessarily in a constant state of development in order to accommodate technological advances and continue to provide a place for state-of-the-art research, as well as national and international cooperation. The basic requirements for this include autonomously supplying new materials and novel nanoelectronic, optoelectronic, and sensor devices  as well as highly developed characterisation methods.

Highly efficient process and device simulations, and the model development and optimisation that build upon them, form the second column of this core research area. New processes, devices, and circuit designs arising from the synergy of these technologies are studied from technological and scientific perspectives as part of this research field.

The third column is circuit design for analogue and digital circuits in the nanometer CMOS technology regime, combining silicon technology and optoelectronics, with a focus on the fields of ultra-high-speed analogue-digital and digital-analogue converters and new operational amplifier concepts in BICMOS technology.

Lastly, the fourth column is sensor and actuator research, concerning the development of innovative microstructure sensor and actuator concepts, implementation in micro- and nanotechnology, and establishment of new mechanical, electrical, and thermal fields of application. The field of bioelectronics addresses bioelectrical processes in cells and attempts to use microelectronic technology to directly and locally record the characteristics of living cells.

The following institutes are involved:

Institute for Microelectronics

Institute of Solid State Electronics

Institute of Sensor and Actuator Systems

Center for Micro and Nanostructures

Photonics Institute

Institute of Electrodynamics, Microwave and Circuit Engineering